Product
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EDA/Interface A Standards
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Description
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- SEMI E120 Specification for the Common Equipment Model (CEM)
- SEMI E121 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
- SEMI E125 Specification for Equipment Self Description (EqSD)
- SEMI E128 Specification for XML Message Structures
- SEMI E132 Specification for Equipment Client Authentication and Authorization
- SEMI E134 Specification for Data Collection Management
- SEMI E138 XML Semiconductor Common Components
- SEMI E147 Guide for Equipment Data Acquisition (EDA)
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Software development kit for equipment suppliers to implement Equipment Data Acquisition (EDA) such as the SEMI Interface A standards and local historical databases that follow the TDI (Tool Data Interface) guidelines.
Provides a high speed data collection framework and a complete set of equipment modeling design and deployment tools.
May also be used directly by Integrated Device Manufacturers with existing equipment SECS/GEM interfaces to generate data collection reports without consuming the SECS/GEM interface.
Visit the CIMPortal Resources page.
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- SEMI E120 Specification for the Common Equipment Model (CEM)
- SEMI E121 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
- SEMI E125 Specification for Equipment Self Description (EqSD)
- SEMI E128 Specification for XML Message Structures
- SEMI E132 Specification for Equipment Client Authentication and Authorization
- SEMI E134 Specification for Data Collection Management
- SEMI E138 XML Semiconductor Common Components
- SEMI E147 Guide for Equipment Data Acquisition (EDA)
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Software library for applications to implement the client-side of the Equipment Data Acquisition (EDA) SEMI standards also known as Interface A.
High performance .NET assembly provides a version-independent abstraction layer and implements the client-side web service. EDAConnect also includes .NET forms to simplify GUI development in EDA client applications.
Visit the EDAConnect Resources page.
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- SEMI E120 Specification for the Common Equipment Model (CEM)
- SEMI E121 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
- SEMI E125 Specification for Equipment Self Description (EqSD)
- SEMI E128 Specification for XML Message Structures
- SEMI E132 Specification for Equipment Client Authentication and Authorization
- SEMI E134 Specification for Data Collection Management
- SEMI E138 XML Semiconductor Common Components
- SEMI E147 Guide for Equipment Data Acquisition (EDA)
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Selected by ISMI as the official Equipment Data Acquisition (EDA) reference client for validating a web server that implements the SEMI Interface A (EDA) standards.
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