Introduction to the SEMI 300mm Standards

Welcome to the SEMI 300mm standard introduction. This is also available in PDF format. Read here if you are new to the standards. Also read a little about what Cimetrix offers as a partner. There is also a list of references.

So you're new to the 300mm SEMI Standards...

The Cimetrix communication products including CIMConnect, CIMFoundation, CIM87, CIM90, CIM40, CIM94, CIM58, and CIM116 were created to aid equipment manufacturers in achieving compliance to specific SEMI standards. The following questions naturally arise:

Why should I care about the standards?
Who or what is SEMI?
How do you know that you are compliant?
What are the standards about?
How can we achieve compliance to the standards?

Continue reading to learn the answers to these important questions.

Why should I care about the standards?

IC manufacturers are stating that equipment will not be purchased if it does not comply with the standards.

Traditionally, most IC manufacturers and many surface mount facilities have required that manufacturing equipment installed in their facilities be able to communicate to a factory host via a GEM-compliant SECS interface. With the move to larger wafer sizes, 300mm and beyond, IC manufacturers are requiring compliance to additional SEMI standards in addition to SECS-II and GEM. These additional standards are described below.

IMPORTANT! With the Securities and Exchange Commission's staff accounting bulletin (SAB) 101 now firmly in place, revenues from your tool sale cannot be realized until your customer has accepted the tool.

Who or what is SEMI?

SEMI is an acronym for Semiconductor Equipment and Materials International. SEMI is the trade association serving the global semiconductor equipment, materials, and flat panel display industries. SEMI represents approximately 2,400 members. For more information on SEMI, please visit their web site, www.semi.org. One of the programs that SEMI operates is the SEMI International Standards Program. This program is a neutral forum that allows suppliers and users to exchange information and to produce specifications for equipment and processing behavior. More than 3,800 participants from around the world help create standards for all areas of processing including factory automation and communications. Participation is open to any interested individual. Participation in the creation of the standards is on a volunteer basis with costs normally being borne by the company of the participant. For more information on the standards and how you can become involved, please visit the standards section of the SEMI web site.

Cimetrix is a participating member of the SEMI standards committee. You may choose to participate in SEMI. See www.semi.org for more details about SEMI participation and membership.

How do you know that you are compliant?

Compliance for the standards is self-declared. Various third-party test programs for selected scenarios exist. Compliance can be verified independently by a number of service providers. Many factories require a machine to pass compliance testing as part of the basic machine acceptance.

Most of the standards have a published compliance checklist. These checklists outline the functionality that the IC manufacturers are requiring. In addition, for 300mm implementations, most end-users are requiring validation of compliance based upon the SEMATECH test scenarios described on http://www.sematech.org/public/resources/stds/300mm/methods.htm.

The degree of standard compliance is included and explained in the equipment's GEM & 300mm Interface Manual. Every GEM compliant equipment must include a GEM interface manual.

WARNING! The standards may change up to three times each year. The Interface Manual should declare exactly which version of the standard is implemented.

What are the standards about?

The SEMI communications standards are similar to the relationship between a two people having a phone conversation.

Transport Protocol Standards (SECS-I or HSMS) are like the phone system used during the conversation. The transport protocol standards describe the way in which data is transferred between the equipment and the host including the physical layer.
Message Format Standards (SECS-II) are like the words used in a phone conversation. The message format standards add a layer of organization on top of the transport protocols by defining messages used in an equipment to host bi-directional conversation.
Specific Functionality Standards (GEM) are like a specific script that a telemarketer may use to manage a phone conversation. The specific functionality standards add specific meaning and interpretation to make use of the data presented by the message format standards.

When people discuss the SEMI standards they will either use the SEMI number identifier such as "E4", the acronym "SECS-I", or more rarely the SEMI long name "SEMI Equipment Communications Standard 1."

Transport Protocol Standards

The transport protocol standards define how messages are transferred between the host and equipment. These standards do not define the data contained within a message. The meaning of messages must be determined through some message standard such as SEMI Equipment Communications Standard E5 (SECS-II).

SEMI E4 SEMI Equipment Communications Standard 1 Message Transport (SECS-I)

The SECS-I standard defines the physical connector, signal levels, data rate, and logical protocols required to exchange messages between the host and equipment over a serial point-to-point data path. This employs an RS-232 communication link.

SEMI E37 High-Speed SECS Message Services (HSMS) Services

High-Speed SECS Message Services (HSMS) defines a TCP/IP based Ethernet connection. HSMS-SS is the single session implementation of this standard for point-to-point communication between one host and one equipment. It is intended as an alternative to SEMI E4 (SECS-1) for applications where higher speed communication is needed and the facilitated hardware setup is convenient. This is the transport protocol required in all 300mm fabs.

Message Format Standard

SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS-II)

The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the structure of messages. The messages are organized into categories called streams that are identified by an integer between 0 and 255. Each stream category contains specific messages called functions also identified by an integer between 0 and 255. A primary message is odd-numbered function. A secondary message is the corresponding even numbered function. A request for information and the corresponding data transmission is an example of such an activity. In most transmissions when either the host or equipment sends a primary message, the response is the corresponding secondary message. In some circumstances, there is no reply. Most of the SECS-II standard is a large library of possible messages a few of which have redundant functionality with different message structures. Most equipment support only a restricted subset of these messages. Some equipment define custom SECS-II messages that are not part of the SECS-II standard.

The SECS-II standard also defines list of allowed data types including ASCII, binary, boolean, 4 and 8 byte floating points, signed and unsigned integers of byte length 1, 2, 4, or 8, and a List; a container for other data elements including other lists.

Specific Functionality Standards

SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM)

The GEM standard defines the behavior of manufacturing equipment as viewed through a communications link. The SEMI E5 (SECS-II) standard provides the definition of messages and related data items exchanged between host and equipment. The GEM standard defines which SECS-II messages should be used, in what situations, and what the resulting activity should be.

The GEM standard does not attempt to define the behavior of the host computer in the communications link. The host computer may initiate any GEM message scenario at any time and the equipment shall respond as described in the GEM standard. The capabilities described in this standard are specifically designed to be independent of lower-level communications protocols and connection schemes (e.g. SECS-I or HSMS, TCP/IP, HTTP). Use of those protocols is not required or precluded by this standard.

The GEM standard defines a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers. Equipment suppliers may provide additional SECS-II functionality not included in GEM as long as the additional functionality does not conflict with any of the behavior of capabilities defined in GEM.

SEMI E39 Object Services Standard: Concepts, Behavior and Services (OSS)

One of the changes in methodology in the 300 mm standards from traditional SECS/GEM implementations is the move towards Object Services. The Object Services Standard (OSS) defines a generic data structure known as an object. It provides general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes. In addition, it provides basic services for reading object attributes, setting their values, and for asking for an object's contents in SECS-II Stream 14 messages. This standard is referenced by other standards that define specific objects, which are made accessible through OSS.

SEMI E40 Standard for Processing Management

Also referred to as the Process Job standard, E40 defines the concepts of material processing, the behavior of the equipment in relation to material processing, and the messaging services that are needed to accomplish material processing. This functionality is grouped into jobs. A Process Job specifies the processing to be applied to the material by a resource. In other words, a Process Job defines which process program (recipe) to use when processing a specified set of substrates. A process job may also include parameters to configure the process program. This standard supports individual management of jobs for sequential processing of material within a group and concurrent processing of independent groups. This standard is most commonly implemented in conjunction with E94 Provisional Specification for Control Job Management.

SEMI E58 Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

ARAMS defines concepts, behavior, and message services to allow the host to collect reliability and maintainability data from the equipment. It interprets SEMI E10 for automated equipment. Although E10 defines various terms and equipment states it was not written specifically for application by automated equipment. For more information about SEMI E10, please contact SEMI (www.semi.org).

SEMI E87 Specification for Carrier Management (CMS)

"E87 standardizes the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space." [SEMI E87, 1] It provides the tools to ensure that the desired carriers arrive at the proper equipment for processing and buffers for storage. E87 includes provisions for reserving a specific load port, verifying carrier IDs, and even verifying slot maps (carrier contents) using some Stream 3 and normal GEM SECS-II messages. Until a carrier ID and slot map are verified, the carrier contents may not be processed. E87 provides for tracking carriers at a load port and within internal buffers as well as for tracking the status of the carriers, load ports, and carrier buffers. For example, a load port may be 'in-service' or 'out-of-service'. A load port may be configured for automatic AMHS operation or manual loading.

SEMI E90 Specification for Substrate Tracking

E90 defines for a standard means to track substrates [manufactured product] in manufacturing product in the same manner as E87 does for Carriers. It "defines the concepts and behaviors for the management of substrates, as well as the message services..The standard is applicable to any manufacturing equipment that handles substrates." [SEMI E90, 1] In general, E90 provides a method to allow the tracking of wafers through individual components of production equipment. The is accomplished by managing substrate objects and all possible substrate locations within the equipment.

SEMI E94 Provisional Specification for Control Job Management

This specification describes equipment-provided services that support a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment. A control job defines a unit of work for one or more carriers. The work is described by a set of one or more process jobs to be applied to the material contained in the carriers. E94 is intended to be used in conjunction with E40 Standard for Processing Management.

SEMI E116 Provisional Specification for Equipment Performance Tracking (EPT)

E116 specifies "basic equipment performance tracking for production equipment" to ".enable the host computer to track basic equipment performance in an automated and consistent matter without operator or host input". [SEMI E116, 1] Not only can the host track the basic equipment states in a modular manner, but the when an equipment is blocked from performing a task, the reason is reported to the host. Although it is similar to E58, E116 is designed more specifically for 300 mm wafer factories where operational scenarios require minimal manual interaction. Both standards can be implemented on the same machine without conflict.

How can we achieve compliance to the standards?

In order to comply to these standards, you must provide the following:

hardware and software to implement the HSMS-SS standard as the Transport Protocol
software to implement the Message Format Standard, SECS-II
software to implement each of the required Specific Functional Standards including the SECS-II message parsing and formatting, state machine management, and standard interdependencies
software to integrate these standards into the machine

Internal Development versus Third Party

Most of the software may be purchased by a third party as a development kit or as custom software integration. An internal development team may also create and maintain everything. In either case, ensure that knowledge of current standards is maintained. Many are finding it convenient to partner with a company that actively maintains expertise in SEMI standard implementations. This will help in interpreting and negotiating requirements with the IC manufacturers and it will allow you to draw upon their experience. This will also dramatically reduce risk and reduce the deployment time. A third party will avoid the common pitfalls and issues a novice stumbles into throughout the standards.

It is important to note that IC manufacturers have reported problems and frustrations with in-house solutions. The equipment will not be accepted for purchase until it passes the tests that verify standard compliance. The first impression during this testing is very important.

Custom Solution versus Development Kits

Development kits offer a more rapid integration of a GEM compliant communications interface. Generally, a development kit does not require a wide breadth of understanding of the SEMI 300mm standards. This radically decreases the learning curve required to actually start the development.

Development kits stay current with the constantly changing standards and when possible provide hooks to allow support of previous versions. This eliminates the need to send your developers to SEMI meetings and makes you compatible with more factory host systems. You generally can call upon your development kit provider to keep your engineers aware of changes in the SEMI standards that may affect their software. The development kit software should be designed in such a way that it allows for easy integration of software upgrades related to changes in the SEMI standards. This should hold true for either new development projects or upgrades to 300mm equipment that has already been delivered to the IC manufacturer.

An indicator of the development kit provider's success in complying with the SEMI standards AND meeting IC manufacturer's requirements is the number of IC manufacturer's facilities using equipment communications interfaces created with the kit. Since all IC manufactures have different needs, you should expect your development kit provider to have a presence in most major IC manufacturing facilities. This will help ensure that your software can be accepted at more than one location and that your development kit provider is giving you the benefit of their experience.

It is important to remember we are dealing with standards that are left to some interpretation. Different IC manufactures use the standards in different ways. If you choose a custom solution, it is imperative that your internal developers gain a good understanding of how the software works so that it can be maintained. Custom software rarely satisfies the differing interpretations. At some point, you will be asked to make a change for a specific IC manufacturer. Development kits often already support the different interpretations.

Cimetrix offers partnerships

Cimetrix delivers a full family of products aimed at upgrading your equipment to the new SEMI 300mm standards. We offer an off-the-shelf software development kit that guides your engineers (internal or contract) to success with your customers. Our products were created by software developers for software developers. Our product documentation, training, working examples including a complete sample application (usable as a starting point), and world-class support make our products easy for engineers to use.

We have direct support for COM/DCOM as well as a straight C++ interface that eliminates the need to directly use COM. We have customers who have implemented complete solutions using Visual Basic, C, C++, C# in .NET, and Java.

If the need arises, Cimetrix also offers integration services, including turnkey solutions, to assist in your development efforts. We have many customers who have been successful with our development kits by doing their own integration, using independent contract integrators, or by using the Cimetrix integration services.

Cimetrix has a good reputation for the solid support it provides to all of its customers. We have many customers who have completed integration and had their tools accepted by all the leading 300mm fabs. We invite you to talk with them, as they will attest to our products and our support.

To get started, we suggest that your engineering team review our software, including our sample applications. This will give you a clearer understanding of our technology, what our products actually implement for you, and provide enough information so you can make an informed decision on implementation time and resources.

For more information concerning how to start your own 300mm project, Cimetrix communication products, SEMI, or how you can get involved in the standards, please contact sales@cimetrix.com.

References

"SEMI E4, SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-I)", Semiconductor Equipment and Materials International.
"SEMI E5, SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)", Semiconductor Equipment and Materials International.
"SEMI E30, GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)", Semiconductor Equipment and Materials International.
"SEMI E37, HIGH SPEED MESSAGE SERVICES (HSMS) GENERIC SERVICES", Semiconductor Equipment and Materials International.
"SEMI E37.1, HIGH SPEED MESSAGE SERVICES SINGLE-SESSION MODE (HSMS-SS)", Semiconductor Equipment and Materials International.
"SEMI E39, Object Services Standard: Concepts, Behavior, and Services", Semiconductor Equipment and Materials International.
"SEMI E87, Specification for Carrier Management (CMS)", Semiconductor Equipment and Materials International.
"SEMI E90, Specification for Substrate Tracking", Semiconductor Equipment and Materials International.
"SEMI E40, Specification for Processing Management", Semiconductor Equipment and Materials International.
"SEMI E94, Provisional Specification for Control Job Management", Semiconductor Equipment and Materials International.
"SEMI E58, AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES", Semiconductor Equipment and Materials International.
"SEMI E116, PROVISIONAL SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING", Semiconductor Equipment and Materials International.