CIM300 ™ Implement SEMI GEM 300 Connectivity Standards
SEMI GEM 300 communication standard compliance is no longer an optional feature. 300mm semiconductor factories require equipment suppliers to fulfill the standards in order to implement factory automation. This challenges equipment suppliers to provide communication functionality to comply with evolving standards as well as fab specific scenarios while meeting demanding delivery dates. Fortunately, the Cimetrix CIM300 product family provides a flexible software architecture and a full complement of software modules that enable quick SEMI standards implementation, including E4, E5, E30, E37, E39, E40, E87, E90, E94, and E116. In addition, Cimetrix demonstrates the commitment to maintain continual involvement in the SEMI standards committees to ensure its products evolve in step with the standards and fab specific scenarios.
- CIM300 Product Architecture
- CIM300 Product Family & Modules
- CIM300 Features & Benefits
- Related GEM 300 SEMI Standards
- Additional GEM 300 SEMI Standards Resources
Cimetrix products are supported on Microsoft software development packages and platforms, along with VMware implementations of supported platforms. For more information about the specific development environments and platforms, request the CIM300 Technical Overview.
Visit the CIM300 Resources page for more information.
CIM300 Architecture
CIM300 uses CIMConnect to manage the SECS/GEM (E4, E5, E30, E37) communication. CIMConnect is a client/server, multiple host communication product for SECS/GEM and other factory interfaces. Additional host interfaces can be based on any protocol. Client applications map data through a DCOM API.
The CIM300 architecture is an object-oriented implementation based on Microsoft DCOM interfaces. This provides a flexible architecture that allows use of only the needed standards and allows for easier upgrading as new versions of the standards are released.
The CIM300 Family provides software development tools for implementing SEMI GEM 300 standards E39, E40, E87, E90, E94 and E116 which are required for 300mm wafer processing equipment in addition to the SECS/GEM standards. The CIM300 product is the core of the CIM300 Family. The CIM300 product includes modules CIMFoundation, CIM40, CIM87, CIM90, CIM94 and CIM116.
Features & Benefits
| Feature | Benefit |
|---|---|
| Modular, object oriented architecture |
Allows equipment suppliers to deploy one or several standards based on fab requirements and tool functionality. |
| Pre-tested to SEMATECH/ISMI test scenarios and SELETE base functionality operational scenarios |
Ensures compliance to published specifications and guidelines |
| Cimetrix "passionate" Support Team. The best in the industry. |
Fast, thorough responses to your questions and issues. |
| Cross standard integration and dependencies designed into each module | Speeds implementation time through reduced integration code |
| Simple, language-independent COM/DCOM architecture and API | Supports most Windows development environments, including those used with the Microsoft.NET framework. Customers can select the most productive programming tools based on the programming staff and application |
| Each module has an easy to understand, open architecture API | Reduces initial development time while allowing access to all advanced product functionality. |
| State machines and SECS-II automated message processors fully implemented | Reduces integration time and eliminates the need to work with SECS-II messages |
| Notification when E87 carrier ID and slot map verification are complete-for all E87 scenarios | Simplifies E87 implementation. |
Since entering the semiconductor automation market in 1999, Cimetrix has quickly become the leading provider of
software products that comply with the demanding requirements of
300mm factory automation. The CIM300 product strategy provides solutions that implement all requirements
published in the SEMI GEM300 communication standards
and that conform to the SEMATECH and Selete base of functional requirements and scenarios. Cimetrix tests against both
the SEMATECH and CCS testing scenarios and implements appropriate recovery functionality. CIM300 achieves maximum
flexibility by implementing each SEMI standard as a separate software module with optional
dependencies on other modules. Customers can purchase the modules as individual software products or together as
an integrated solution. As the standards and scenarios further mature and new standards emerge, CIM300 will continue
to provide compliance to the pertinent SEMI standards. CIM300/ CIMConnect was given the
Semiconductor International Editor's Choice Award in 2001.
Module & Product Summaries
CIMFoundation
CIMFoundation provides an interface for the CIM300 functional modules that is independent of the SECS/GEM product providing the host communication. This includes an abstraction layer so that the E39 module and other CIM300 modules can send and receive SECS-II messages. CIMFoundation also provides SEMI E39 Object Services for the CIM300 functional modules and user-written modules. Each of the CIM300 packages completely manages its own E39 objects automatically. Nevertheless, users may create additional E39 GEM300 objects & attributes, add new attributes to standard CIM300 E39 objects,read any objects & attributes, modify any objects & attributes and receive notification when any objects & attributes are modified. CIMFoundation handles Stream 14 messages received via commercial GEM packages. In addition, CIMFoundation implements the top OSS object. An E39 ActiveX Control provides a convenient, real-time view of all E39 objects and attributes, including any added by the equipment supplier.
CIM40
CIM40 implements Processing Management (PRJ). The module implements the Process Job object and the associated state machine. The CIM40 module manages the material processing within the equipment. CIM40 supplies communication services through SECS-II messaging allowing process job commands and process job alert notifications.
The CIM40 interface provides methods that logically correspond to Process Job functions. The module has two COM objects and a callback interface. One object represents a Process Job and the other is the PRJ module itself. The callback interface is used to notify the client application of PRJ services requested by a host or changes to any of the PRJ state machines. Process Jobs are automatically queued and coordinated with CIM94 Control Jobs. Nevertheless, CIM40 can also be used without CIM94 to implement Process Jobs without Control Jobs. A callback notifies the application when to run process jobs and provides the pertinent setup and target details.
CIM40 provides API functions to implement all of the 300mm host functionality. This enables the developer to utilize the CIM40 API functions to implement process job management for local operation mode. This minimizes the software differences between remote and local operation. It also means that developers can implement a 200mm to 300mm bridge to convert 200 mm remote commands and recipe-wafer assignment into 300mm process job management.
CIM87
CIM87 provides the tools to implement Carrier Management. This module handles E87-related SECS-II messages received via CIMFoundation. In addition, CIM87 manages the carrier object and the following state machines: Carrier, Load Port Transfer, Reservation, Access Mode, and Load Port/Carrier Association. All data and events associated with the state machines are automatically exposed to the host through CIMFoundation and the SECS/GEM package.
The CIM87 interface provides methods that logically correspond to CMS features. The package includes three COM objects including a callback interface implemented by the client application. One COM object represents a carrier and the other is the CMS module itself. The callback interface is used to notify the client application of CMS services requested by a host.
Certain aspects of the physical equipment must be modeled in the CIM87 module. Load ports, carriers, and internal buffers are all modeled using CIM87 API functions. Callback functions notify the client application when a change to the physical entity is requested.
CIM87 provides API functions to implement all of the 300mm host functionality. This enables the developer to utilize the CIM87 API functions to implement carrier ID verification, slot map verifiation and other E87 features for local operation mode. This minimizes the software differences between remote and local operation.
CIM90
CIM90 implements the substrate and substrate location objects and their state machines. All data and events associated with the state machines are automatically updated through CIMFoundation. The CIM90 interface provides methods that logically correspond to ST functions. The module has three COM objects including one object representing a substrate, another representing a substrate location, and the last representing the CIM90 module itself. The CIM90 COM object serves as a container for both the substrate and the substrate location objects. The substrate and substrate location objects are managed using the methods of the CIM90 object.
Certain aspects of the physical equipment must be modeled in the CIM90 module. Substrate locations in the machine are modeled in the CIM90 module through API functions. When CIM90 is used with CIM87, then CIM90 automatically creates, manages, and eventually deletes all of the substrate objects and substrate locations associated with carriers when they arrive at and depart from the load port(s).
CIM94
CIM94 implements Control Job Management (CJM). The module implements the Control Job object and its associated state machine.
The CIM94 interface provides methods that logically correspond to Control Job functions. The module has two COM objects and two callback interfaces. One object represents a Control Job and the other is the CJM module itself. One callback interface is used to notify the client application of CJM services requested by a host or changes in CJM state. The other callback interface is used to control Process Jobs if client does not use Cimetrix CIM40 module for Process Job Management. If the application uses the CIM40 module, CIM94 may be used to control CIM40 Process Jobs as well.
CIM94 provides API functions to implement all of the 300 mm host functionality. This enables the developer to utilize the CIM94 API functions to implement control job management for local operation mode. This minimizes the software differences between remote and local operation. It also means that developers can implement a 200 mm to 300 mm bridge to convert 200 mm lot scheduling and remote commands into 300mm control job management.
CIM116
CIM116 manages the Equipment Performance Tracking (EPT) State Model for the equipment and for each module. The equipment may define as many modules as desired. CIM116 has two COM interfaces. One interface represents an EPT module and the other is the main CIM116 module. When any EPT module implements a transition, simply notify CIM116 and update the transition properties. CIM116 provides unique functions for defining production modules and EFEM modules. CIM116 automatically manages the machines EPT State Model based on the state of the production modules.
Supported SEMI Standards
-
E39 Object Services
E40 Process Job
E87 Carrier Management
E90 Substrate Tracking
E94 Control Job
E116 Equipment Performance Tracking
System Requirements
Cimetrix supports CIM300 for use with the following Microsoft operating systems and VMware implementations:
- Windows 2000
- Windows XP
- Windows 2003 Server
- Windows 2008 Server
- Windows 7
* Note: On 64-bit operating systems, CIM300 runs as a 32-bit application.
Supported software development packages:
- Microsoft Visual Studio 6.0 2003, 2005, 2008, 2010
- Borland C++ Builder 6
Supported programming languages:
- Microsoft Visual Basic, C++, C#, and VB.NET
- Borland C++
Other System Requirements:
- 100 MB hard drive space
- Ethernet card for HSMS-SS communication (Protocol: TCP/IP)
- RS-232 port for SECS-I
Supported SEMI SECS/GEM Standards
- E4 SECS-I (Serial protocol)
- E5 SECS-II
- E30 GEM
- E37 HSMS-SS (Ethernet protocol)
Additional Information
Some of this information may require Acrobat Reader available for free from Adobe.
- Download the CIM300 Datasheet
- Request the CIM300 Technical Overview
- Visit the CIM300 Resources page for more information on the product
- Download the complete white paper on the SEMI GEM300 Standards
- View a Presentation on GEM 300 objects, attributes and state models
- Read the article on the Evolving World of SECS/GEM by by Corina Mullen, Semiconductor International, July 2001
Schedule an architecture discussion to discuss your individual project requirements.
