The CIMPortal^TM software toolkit provides a comprehensive equipment data acquisition (EDA) solution for equipment manufacturers.

In addition, CIMPortal can be used by integrated device manufacturers (IDMs) who are retrofitting existing equipment. The Software Development Kit (SDK) includes tools for designing, developing, testing, optimizing, and deploying EDA/Interface A communications that fully comply with the SEMI standards and accommodates data collection from different software and hardware platforms.

Equipment suppliers use the CIMPortal software to implement an EDA/Interface A factory connection in the minimum amount of time and cost. In particular, they like the many features CIMPortal offers that make tool model building easier than any other solution, including an easy-to-use GUI with Visual Studio-style property windows and Outlook-style menus for drag-and-drop model building. You can build equipment models that synchronize automatically with other software and hardware configurations. Use the New Model wizard to create a well-constructed equipment model quickly, including an implementation of the GEM 300 SEMI standards.

The heart of a good EDA interface is the tool model. The CIMPortal toolkit includes many features that make model building easy. There is a GUI with Visual Studio-style property windows and Outlook-style menus for drag-and-drop model building. You can build equipment models that that are SEMI E120/E125/E164 compliant, support ISMI Freeze Version I and II, and will  pass both the Metadata Conformance Analyzer (MCA) and the GLOBALFOUNDRIES Site Acceptance Test (SAT) tool.

While not required by Interface A, CIMPortal also provides the ability to store process data in a local database through the database service module, which you can use for local diagnostics and performance optimization.

Visit the CIMPortal Resources page for more information.

CIMPortal Architecture

Use the Equipment Modeling GUI to design and develop an E120 /E125/E164 compliant XML Equipment Model that describes the major equipment components in a hierarchal form and lists all of the associated Parameters, Events, Exceptions, and SEMIObjTypes available for data gathering. During development, use the Equipment Modeling GUI to map the data available through Cimetrix Data Collection Interface Modules (DCIM) and custom DCIM with the XML Equipment Model. You can also add Access Control Lists to create protected data that only authorized clients can access.

Comply with E164

The E164 standard, approved by SEMI in mid-2012, was developed to encourage companies using EDA/Interface A connections to use a more consistent and high-quality definition of their equipment's model, as represented in the metadata file. Developers can use the MCA, available from ISMI, to validate the equipment models they generate.

For more information about SEMI Standard E164, visit our E164 page.

Database Service

The CIMPortal database module supports collecting data into an SQL database for storage on the tool. The module complies with industry specifications, guidelines and requirements for storage and management of data in a local database. All data available to Interface A clients can also be stored in the on-tool database.

Data Collection Interface Modules (DCIM)

CIMPortal gathers data directly from multiple sources, unifies the data within a single Equipment Model, and delivers the unified data seamlessly into an Interface A implementation using Cimetrix technology called Data Collection Interface Modules (DCIMs). All of the different data sources are integrated into a single E125 compliant Equipment Model.

CIMPortal includes a template for creating custom DCIM and technical assistance for using each of the packaged DCIM. Use the DCIM test application to unit test DCIM development and configuration. During development, testing, and optimization, you can use the open-source EDA Clients to validate the interface implementation.

CIMPortal Development Environment

The CIMPortal software development kit includes tools for designing, developing, testing/optimizing and deploying an EDA/Interface A solution. Performance and flexibility have been carefully considered to allow adherence to SEMATECH requirements while considering the technical challenges when integrating multiple distinct data sources. Use the Equipment Modeling GUI to design and develop an E120 /E125 compliant XML Equipment Model that describes the major equipment components in a hierarchal form and lists all of the associated Parameters, Events, Exceptions, and SEMIObjTypes available for data gathering.

During development, use the Equipment Modeling GUI to map the data available through Cimetrix Data Collection Interface Modules (DCIM) and custom DCIM with the XML Equipment Model. If desired, add Access Control Lists to create protected data that only authorized clients can access. CIMPortal includes a template for creating custom DCIM and technical assistance for using each of the packaged DCIM. Use the DCIM test application to unit test DCIM development and configuration.

During development, testing, and optimization, use the open-source Interface A Clients to validate the Interface A implementation. Once the Interface A solution is completed, multiple Interface A Clients can simultaneously establish sessions with the CIMPortal Engine, define Data Collection Plans and receive the generated Data Collection Reports. After deployment, the E132 authentication, message security and diagnostics features are configurable through the CIMPortal Administrator without the need to restart. In accordance with the SEMI EDA standards, CIMPortal provides all of the features necessary so that the IC Maker can extend the Equipment Model with new components and metadata.

Cimetrix Cooperation with ISMI

Cimetrix remains committed to maintaining continual involvement in the SEMI standards committees to ensure our products evolve in-step with those standards and fab specific scenarios. Under contract with ISMI, Cimetrix has developed the following products to help companies with the adoption of EDA/Interface A:

• EDA Client Connection Emulator (ECCE), which supports the 1105 EDA Freeze Version
• EDA Client Connection Emulator version 2 (ECCE v2), which supports both the 1105 and 0710 EDA Freeze Versions
• EDAViewer
• Equipment Simulator
  

Cimetrix Project Support

When you use a Cimetrix product, our goal is to allow you to control your own destiny.  You get our dedicated, passionate support throughout the entire development process. We recommend product training to get your team up to speed quickly. If needed, we also have engineering personnel to work with you on project planning, engineering design, and initial deployment.

Talk to us. We also have strong experience replacing older GW products. Let us know your project requirements to see if CIMPortal is a good solution for you.

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Related SEMI Standards

• SECS/GEM SEMI Standards: Reference to an equipment interface that complies with SEMI standards, E5 (SECS-II), E30 (GEM), and E37 (HSMS) to provide basic fab MES connectivity. CIMPortal can utilize the features in these standards as one source to generate Interface A Data Collection Reports. These standards also provide the foundation for other connectivity standards such as E39, E40, E87, E90, E94, and E116.
• E120 Specification for the Common Equipment Model (CEM) and E125 Specification for Equipment Self Description (EqSD): SEMI E120 defines the Common Equipment Model, an abstract model for describing an equipment's physical structure. SEMI E125 is a specific implementation of E120 for equipment self-description that includes units, types, events, state models, equipment structure, and alarms/exceptions. CIMPortal requires a unique data model file for each tool that adheres to these standards. CIMPortal includes an XML schema to enforce the rules for the data model file.
• E132 Specification for Equipment Client Authentication and Authorization: SEMI E132 defines client authentication and a flexible authorization scheme to control client access. A client cannot access any information through Interface A until authenticated by CIMPortal. Authenticated clients must obtain authority to access data within Interface A. This allows equipment suppliers and fabs to establish rules that restrict access to sensitive or proprietary information.
• E134 Specification for Data Collection Management: SEMI E134 defines the format and usage of Data Collection Plans and Data Collection Reports for Interface A messaging. CIMPortal accepts standard Data Collection Plans from Interface A Clients and generates the appropriate standard Data Collection Reports using Web Services.

Supported SEMI SECS/GEM Standards

• E4 SECS-I (Serial protocol)
• E5 SECS-II
• E30 GEM
• E37 HSMS-SS (Ethernet protocol)

In addition, software applications running on non-Windows operating systems like Unix can provide data directly into CIMPortal using the TCP/IP DCIM or TCP/IP App DCIM using a TCP/IP port. While CIMPortal must run on a Windows computer, it is common to use CIMPortal with equipment that have non-Windows computers. Equipment suppliers that use PLCs, Unix or QNX based control systems add a Windows PC to run CIMPortal to handle the factory communications. Software architects frequently design internal equipment networks with software applications to communicate between systems.

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