Data-Driven Tool Control Architectures Presentation at AEC/APC 08
Cimetrix and Axcelis Technologies to recount findings of thier joint development project
SALT LAKE CITY, UT – October 3, 2008 – Cimetrix, Incorporated (OTC: CMXX), a leading provider of factory connectivity and equipment automation software and solutions for the global semiconductor, photovoltaic, and electronics industries, will present with Axcelis Technologies, at the annual AEC/APC Symposium in October 2008. The presentation will focus on Data-Driven Tool Architectures and the results of a Joint Development Project between the two companies completed this year. Throughout the presentation, the companies will discuss the industry’s increasing demand for higher quality and quantity of data to achieve optimal equipment productivity and the benefits of a data-driven architecture.
In late 2006, the two companies began work on a joint development project to create an equipment control software solution based on a data-driven architecture. Motivated by their shared vision of improved quality and quantity of data, Axcelis and Cimetrix developed Cimetrix’s CIMControlFramework™ for a new Axcelis multi-chamber wafer cleaning system, the Integra RS™. The goal of the project was to deliver optimum data collection, storage, management, and analysis to benefit both the equipment supplier and end user. Use cases and data analysis examples will be included in the presentation.
This year, the Symposium will be held on October 4 through 8 in Salt Lake City, Utah at the Cliff Lodge at Snowbird. The Data-Driven Tool Architectures presentation is one of the Technical Sessions offered on Tuesday, October 7 at 3:30 p.m. The authors are Glen Gilchrist, Senior Systems Engineer, Axcelis Technologies; Larry Bourget, Director of Product Management, Axcelis Technologies; and Kourosh Vahdani, VP of Global Services, Cimetrix, Inc.
About Cimetrix Incorporated:
Cimetrix designs, develops, markets, and supports factory automation and equipment control software for the global semiconductor, photovoltaic, and electronics industries. A leading participant in SEMI standards development, Cimetrix’s connectivity software allows for quick implementation of the SECS/GEM, GEM300 and EDA standards.
The Company’s products can be found on virtually every tool type in nearly every semiconductor 300mm factory worldwide. The added-value of Cimetrix’s passionate support and professional services creates the industry’s only complete software solution. Key products include:
Cimetrix is an active member of Semiconductor Equipment and Materials International (SEMI), the International SEMATECH Manufacturing Initiative (ISMI) as well as the PV Group. For more information, please visit www.cimetrix.com.
Data-Driven Tool Control Archutecture Resources and Information
