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An Introduction to the GEM Standard

The Generic Model For Communications And Control Of Manufacturing Equipment (GEM) standard is maintained and published by the non-profit organization Semiconductor Equipment and Materials International (SEMI). It is designated as SEMI standard E30. GEM intends "to produce economic benefits for both device manufacturers and equipment suppliers..." by defining "... a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers" [SEMI E30, 1.3]. GEM is a standard implementation of the SECS-II standard, SEMI E5. The GEM standard is applicable to any manufacturing equipment. Many equipment in semiconductory, surface mount technology, and electronics assembly industries provide a GEM interface so that the factory host may interface to the machine for monitoring and/or controlling purposes. The standard is general enough to apply to any manufacturing equipment.

All GEM compliant manufacturing equipment share a consistent interface and certain consistent behavior. All may communicate with a GEM capable host using either TCP/IP (using the HSMS standard, SEMI E37) or RS-232 based protocol (using the SECS-I standard, SEMI E4). Often both protocols are supported. Each piece of equipment may be monitored and controlled using a common set of line management tools defined by GEM. When an equipment has a GEM interface, it takes just minutes (or even seconds) for factory GEM host software to establish communication and begin monitoring the machine's activity. This means that equipment manufacturers may spend more time and money improving the machine's quality by providing a common interface to all factories. It means that factories may spend more time and money improving production and processes, rather than setting up communication to the machines.

GEM Architecture

Typical GEM implementations incorporate an architecture where a single host computer acts a line management system for one or multiple manufacturing equipment. The host communicates directly with each equipment using either the SECS-I standard (RS-232 based serial communication) or HSMS-SS standard (TCP/IP based network communication). Certainly the HSMS-SS standard is more appropriate and convenient for today's modern factories.

Once low-level communication is established, then the host and equipment may exchange SECS-II messages. A SECS-II message is identified by a stream number (0-255) and a function number (0-255). An odd-numbered function is a primary SECS-II message. A consecutive, even-numbered function is a secondary message--the reply to the corresponding primary message. Unless the reply bit is clear, a primary message should always be responded to with a secondary message. For most SECS-II messages, a seconday reply message is required. For example, if the host sends an S1,F1 (stream 1, function 1) message to request 'Are you there?', then equipment will send a reply S2,F2 message to indicate 'I am here'. The SECS-II standard defines a large set of standard SECS-II messages, primary messages and the corresponding secondary messages. Some SECS-II messages may be sent by only the host. Some may be sent only by an equipment. Other messages may be sent by either the host or equipment.

SECS-II messages are sent as structured binary data. It is a very effective means to package information across a network without wasting bandwidth. When using the SECS-I standard, RS-232 serial communication, the message size is limited to about 8 MB. When using the HSMS standard, TCP/IP network communication, the message size is limited to about 16 MB.

The GEM standard defines a number of SECS-II messages scenarios; an ordered sequence of SECS-II messages. The SECS-II message scenarios establish an implementation guideline so that the equipment manufacturer can anticipate how the host might use the GEM standard.

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Features

The GEM standard's key features are described in the following paragraphs. Minimal GEM compliance only requires a small set of these features to be supported. Many of the described features are optional.

Communication

The GEM standard defines how an equipment and host initially establish communication. It also defines how communication is re-established when communication is broken. An on-line identification method verifies the equipment's hardware and software identity. Terminal service features allow the host operator and equipment operator to exchange text manually typed at a console.

Control

The GEM standard outlines a control state model to define the level of cooperation between the host and equipment. GEM Equipment provide three basic levels of host control which determine the host's ability to control and monitor the equipment.

Remote control capabilities permit the host to send GEM-defined commands like "START", "STOP", "PAUSE", "RESUME", and "ABORT" to control the equipment's processing. The equipment may support custom commands. A command may have arguments with data.

Equipment constant features allow the host to set and retrieve equipment constant values which govern the equipment's behavior. GEM requires a small set of equipment constants to configure the GEM state machines. A machine may define additional equipment constants to provide refined control of the equipment's behavior.

Operation Notification

Collection events and alarms allow the host to keep track of an equipment's operations. Equipment collection events notify the host of significant normal and abnormal activity. Equipment alarms notify the host when potentially dangerous activity is detected and cleared. The host determines which collection events and alarms are setup for notification to minimize and control communication traffic.

Data Gathering

GEM defines six methods of gathering data. The host may gather data from the equipment, but not vice-versa.

  • A set of status variable values may be requested at any time.
  • A set of equipment constant values may be requested at any time.
  • A report containing status variable, data variable, and equipment constant values may be requested at any time.
  • Reports may be attached to a collection event so that the report information is transmitted along with the collection event automatically. This feature enables data to be sent to the host as the values become available thereby reducing or possibly eliminating the host's obligation to poll information.
  • The host may define traces so that the equipment automatically transmits the specified status variable values every specified time period. This feature facilitates time-based data collection.
  • The host may configure limits monitoring so that the equipment notifies the host whenever a specified variable value transitions across a host-defined limit boundary. This features eliminates the need for the host to poll critical values is situations where the host is only concerned when the value becomes too high or low. Multiple limit boundaries may be defined.

    Process Program (Recipe) Management

    A process program "is the set of instructions, settings, and parameters under control of the equipment that determine the processing environment seen by the manufactured object" (SEMI E30, 4.2.6.1). Process program management tools permit the following:

    • Host may download a process program to the equipment for storage on the equipment.
    • Host may query a process program from the equipment for storage on the host.
    • Host may delete a process program on the equipment.
    • Host may request a list of available process programs.
    • Equipment operator may send a process program to the host.
    • Equipment operator may request a process program from the host.
    • Host may select a process program for execution.
    • Equipment will notify the host when a process program is created, edited, deleted, or selected by the equipment operator.

    Spooling

    Spooling capabilities provide the means for the equipment to queue information intended for the host during communication failure. When communication is restored, the host may purge or request the queued data. The host may configure which information is queued, how a full queue is handled, the queue size, and how queued information is recovered. The host may also switch spooling features on or off.

    Documentation

    The GEM standard requires that each equipment provide a separate GEM interface manual. It must include a GEM compliance statement, complete SECS-II message documentation, complete GEM state model documentation, and a description of all equipment variables, alarms, collection events, equipment constants, and remote commands.

    GEM Compliance Statement

    Every GEM compliant equipment must include a GEM compliance statement in the documentation. The table declares not only which features are implemented, but also indicates whether or not implemented features comply to the standards. This implies that an equipment can provide a partical GEM implementation and still be considered GEM compliant. Some of the GEM features simply are not appropriate for some manufacturing equipment. If a feature is implemented, but not quite compliant, then simply document the exception. Here is a sample GEM compliant statement.

    GEM Compliance Statement
    FUNDAMENTAL GEM REQUIREMENTS IMPLEMENTED GEM-COMPLIANT (See Note 1)
    State Models rYes rNo rYes rNo
    Equipment Processing States rYes rNo
    Host-Initiated S1 = F13/F14 Scenario rYes rNo
    Event Notification rYes rNo
    On-Line Identification rYes rNo
    Error Messages rYes rNo
    Documentation rYes rNo
    Control (Operator Initiated) rYes rNo
    ADDITIONAL CAPABILITIES IMPLEMENTED GEM-COMPLIANT (See Note 2)
    Establish Communications rYes rNo rYes rNo
    Dynamic Event-Report Configuration rYes rNo rYes rNo
    Variable Data Collection rYes rNo rYes rNo
    Trace Data Collection rYes rNo rYes rNo
    Status Data Collection rYes rNo rYes rNo
    Alarm Management rYes rNo rYes rNo
    Remote Control rYes rNo rYes rNo
    Equipment Constants rYes rNo rYes rNo
    Process Program Management rYes rNo rYes rNo
    Material Movement rYes rNo rYes rNo
    Equipment Terminal Services rYes rNo rYes rNo
    Clock rYes rNo rYes rNo
    Limits Monitoring rYes rNo rYes rNo
    Spooling rYes rNo rYes rNo
    Control (Host-Initiated) rYes rNo rYes rNo

    Note 1: Do not mark YES unless all fundamental GEM requirements are implemented and GEM Compliant.

    Note 2: Additional capabilities may not be marked GEM-compliant unless the fundamental GEM requirements are GEM compliant.

    Additional Comments

    • While the equipment determines how much information is available to the host, ultimately the host determines the bandwidth utilization by enabling the desired collection events and alarms and by disabling the undesired ones. The host also determines the amount and frequency of data gathering, recipe management, remote commands, and other features. If all of the events and alarms are disabled, then a GEM interface connection will be nearly silent.
    • The GEM standard defines relatively few features. If a machine implements a minimum GEM interface with only the required data variables, status variables, equipment constants, and collection events then the GEM interface is only marginally useful. The GEM interface's full value is realized only when the equipment supplier provides additional machine-specific alarms, data variables, status variables, equipment constants, and collection events.

    Frequently Asked Questions

    Where can I get a copy of the GEM standard?

    Official copies must be obtained through SEMI. SEMI offers excellent internet services at their website. Standard documents may be ordered or downloaded for a fee at the SEMI website

    How does a system become GEM certified?

    There is no official GEM certification. GEM compliance is self proclaimed. Software programs are available for testing GEM Equipment such as TESTConnect. Note that GEM compliance does not require all GEM features to be implemented. For example, some equipment do not implement remote commands and process program management.

    Can more than one host establish communication with an equipment at one time?

    Not in most systems. However, the Cimetrix CIMConnect product has a built-in feature that inherently makes it trivial to communicate with more than one SECS/GEM host. Additionally, Cimetrix host software GEM Host Manager does permit multiple applications to access an equipment simultaneously even if the applications are running on different computers.

    GEM Terminology

    Term Description
    Alarm "An alarm is related to any abnormal situation on the equipment that may endanger people, equipment, or material being processed" [SEMI E30, 2]. GEM allows the host to be notified when alarm conditions are detected and cleared.
    Collection Event A collection event is a "detectable occurrence significant to the equipment" that "is considered to be significant to the host". [SEMI E30, 2] GEM allows the host to be notified when a collection event occurs. This allows the host to track the equipment's activity.
    Data Variable Data variables "…may only be valid upon the occurrence of a particular event". [SEMI E5, 6.6]. The host may gather data variable values from the GEM Equipment.
    Equipment Constant Equipment Constants are "settable by the Host"[SEMI E5 6.6]. The host may gather equipment constant values from the GEM Equipment. The host may also set equipment constant values on the GEM Equipment to control the equipment's behavior.
    GEM Equipment An "intelligent system which communicates with a host" [SEMI E4, 2.1] and complies to the GEM standard.
    Host "An intelligent system which communicates with the equipment." [SEMI E4, 2.1]. The host may be viewed as a line management system. GEM does not intend to define how the host should behave. The GEM standard defines the set of messages a host must use when interacting with GEM Equipment. A GEM Equipment may communicate with one host. A host may communicate with multiple GEM Equipment.
    HSMS-SS High Speed Message Service-Single Session - defines TCP/IP network communication used by GEM for host/equipment communication. It is replacing the SECS-I standard.
    Process Program A Recipe (see Recipe)
    Recipe A set of instructions for the equipment.
    Report "A set of variables predefined by the equipment or defined by the host…". The host uses reports to gather status variable, data variable, and equipment constant values. The host may request a report explicitly or attach a set of reports to a collection event.
    Status Variable "Status variables may include any parameters that can be sampled in time such as temperature or quantity of a consumable." [SEMI E5, 6.5] "Status values … always contain valid information." [SEMI E5, 6.6]. The host may gather status variable values from the GEM Equipment.
    SECS-I SEMI Equipment Communications Standard 1 Message Transfer - defines RS-232 serial communication used by GEM for host/equipment communication. It is phasing out due to inherent speed limitations. It is being replaced by the HSMS standard.
    SECS-II SEMI Equipment Communications Standard 2 Message Content. GEM is a specific implementation of the SECS-II standard. SECS-II defines most concepts and functionality used in the GEM standard. Many SECS-II capable systems are not GEM compliant.
    SECS-II Message All GEM Equipment and host communication is accomplished using SECS-II messages. Each unique SECS-II message is identified by its stream number (S) and function number (F). The SECS-II standard defines a large set of SECS-II messages determining each one's purpose, content, and usage. The GEM standard defines how to use a subset of these SECS-II messages yet allows other SECS-II messages to be used in addition to this subset.
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