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Cimetrix Software ProductsImplement SEMI Standards

Best-In-Class SEMI Standards Sofware Cimetrix is the industry’s most trusted source for efficient implementation of the SECS/GEM, GEM300 and Equipment Data Acquisition (EDA also known as Interface A) standards. At the forefront of emerging SEMI® standards development, we maintain Co-Chair positions on both the SEMI NA GEM300 and DDA task forces.

Cimetrix offers a full suite of products for successful implementation of the SEMI connectivity standards: SECS/GEM, 300mm Connectivity Standards and EDA/ Interface A. Currently, our products are used by over 60 equipment suppliers on virtually every tool type in nearly every 300mm factory worldwide. To date, we have shipped over 10,000 GEM interfaces to the semiconductor, photovoltaic and related electronics industries.

Cimetrix offer a complete set of proven and tested solutions that enable faster fab acceptance and time to market Award Winning SEMI Connectivity Standards Software for our customers.Our products CIMConnect, CIM300 and CIMPortal have received industry recognition as "best-in-class" products for SECS/GEM, GEM300, and Interface A respectively.

SEMI Connectivity Standards Software

SEMI Standards Software Products

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SECS/GEM

The SECS GEM standard defines messages, state machines and scenarios to enable factory software to control and monitor manufacturing equipment. Many equipment in semiconductor (front end and back end), surface mount technology, electronics assembly, photovoltaic, flat panel display and other manufacturing industries worldwide provide a SECS GEM interface on the manufacturing equipment so that the factory host software can communicate with the machine for monitoring and/or controlling purposes. Because the GEM standard was written with very few semiconductor-specific features, it can be applied to virtually any manufacturing equipment in any industry.

View the complete list of Software Products for SECS/GEM Implementation.

GEM300

With the transition to 300mm wafers, the level of factory automation in the fabs increased significantly. SEMI introduced the GEM 300 standards to allow this dramatic change to be implemented as cost effectively as possible. Compliance with the SEMI 300mm communication standard is no longer optional. 300mm semiconductor factories require equipment suppliers to fulfill the standards in order to implement factory automation.

View the GEM300 Family of Software Products.

Interface A/ EDA

Industry experts developed the Interface A standards in order to facilitate data acquisition integration and improve data quality. Fabs will use Interface A for APC data gathering and e-diagnostics while the existing SECS/GEM interface will remain intact for MES connectivity. When implemented, these standards provide a convenient interface for Equipment Data Acquisition using SOAP/XML messages over an HTTP or HTTPS connection.

View Cimetrix's Products & Tools for Implementing the Interface A Standards.

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Equipment Control Software

Over 20 years ago, Cimetrix’s core business consisted of PC-based advance motion control software and technology. The Cimetrix Open Development Environment™ (CODE) has been successfully deployed on a wide range of demanding applications in various industries-from surface mount (SMT), semiconductor, and electronic assembly to multi-axis robots, packaging and machine tools.

In 2006, the Company came full circle when it entered into a Joint Development Project with leading semiconductor equipment supplier, Axcelis Technologies, to develop a new tool control solution for the Next Generation Factory. CIMControlFramework is an equipment automation framework with a data-driven architecture. It allows equipment suppliers to meet the supervisory control, material handling, platform and process control and factory automation requirements of the fabs.

View all of our Equipment Control Solutions.

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SEMI Standards Tools & References

Cimetrix has partnered with the International SEMATECH Manufacturing Initiative (ISMI) to provide reference artifacts to guide the industry, ensuring accuracy and interoperability of SEMI standards implementation: RaP Reference Implementation (RRI) and Equipment Client Connection Emulator (ECCE).

Tool Standards Description
ECCE
  • SEMI E120 Specification for the Common Equipment Model (CEM)
  • SEMI E121 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
  • SEMI E125 Specification for Equipment Self Description (EqSD)
  • SEMI E128 Specification for XML Message Structures
  • SEMI E132 Specificaiton for Equipment Client Authentication and Authorization
  • SEMI E134 Specificaion for Data Collection Management
  • SEMI E138 XML Semiconductor Common Components
  • SEMI E147 Guide for Equipment Data Acquisition (EDA)
Selected by ISMI as the official Equipment Data Acquisition (EDA) reference client for validating a web server that implements the SEMI Interface A (EDA) standards.
RRI
  • SEMI E139.2 SECS-II Protocol for Recipe and Parameter Management (RaP)
  • SEMI E139.3 XML/SOAP Binding for Recipe and Parameter Management
An ISMI sponsored project for a "reference implementation" of the SEMI E139 Recipe and Parameter (RaP) Management standard.

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