Data Fusion at the Source: Standards and Technologies for Seamless Sensor Integration
Symposium 2015 - eMDC and ISSM
Taipei, Taiwan, 2-3 September 2015
The purpose of the work described in this presentation is to unify the data collected from external sensors with equipment and process information from other sources (including the tool itself), so that analysis applications and their users can directly use that information without any time-based alignment, namespace mapping, or other data transformations typically required in this situation.
The basic idea is to handle the association of necessary context information (lot, substrate, product, layer, process, recipe, step, chamber, etc.) with the raw collected data as close to the source as possible, using a single, integrated model of the equipment and all related data sources.
Find out more by selecting from the material available or schedule a meeting with a Cimetrix representative.