Device Scaling vs. Process Control Scaling: Advanced Sensorization Closes the Gap

Joint Presentation with GLOBALFOUNDRIES

From Innovation Forum for Automation 2018 

The rapid pace of device scaling in recent years has outrun the ability of today’s generation of equipment control systems to keep up. New device architectures and the materials and processes used to realize them create sources of variability that require better techniques for real-time sensing, filtering, detection, and response.  Effectively, these processes are “flying blind.” 

GLOBALFOUNDRIES, a long-time leader in equipment automation and process control, has addressed these issues by integrating specialty sensors into the broader control environment, and shares highlights of their experience for a number of specific process areas in this presentation. It also covers techniques for leveraging today’s data collection standards to streamline the integration process.

The resulting system architecture described in this presentation leverages a combination of high-performance commercial sensor data collection hardware, storage, management and analysis platforms with the latest generation of SEMI EDA/Interface A (Equipment Data Acquisition) communications standards, providing advanced sensor data to address an ever-changing set of manufacturing technology and market priorities.

Find out more by selecting from the material available or schedule a meeting with a Cimetrix representative.

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