Raising the Bar: Foundry Expectations for Equipment Capability and Control

29th APC Conference Keynote Address

Boyd Finlay, GLOBALFOUNDRIES - October 2017

Key Messages: 

  • Fab engineers expect fully-integrated instrumentation on and around equipment to provide well-established, unambiguous HVM-sensing BKMs. 
  • Fab engineers must be able to access and model empirically-selected trace data from all instruments and gauges designed into semiconductor equipment. 
  • Onboard equipment operating systems and supporting hardware must be improved to enable >95% automation stability.
  • Equipment design and automation is not providing all the necessary fault detection capability.  Fabs expect this issue to be addressed faster with deeper collaboration around FMEA and unambiguous process and equipment health signals. 

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