The Role of Models in Semiconductor Smart Manufacturing

28th Advanced Process Control Conference
Mesa, Arizona - October 17-20, 2016

The purpose of the work described in this presentation is to show how the information captured in equipment models can support a wide range of manufacturing applications, some of which are increasingly vital to the final product quality and overall productivity of leading edge wafer fabs .

After demonstrating how individual elements of a common equipment model can be used to drive some basic production monitoring use cases, the presentation will explain how more complex algorithms can be supported in real time using multiple sections of an integrated model, using the Lot Completion Estimation application as the example.

Find out more by selecting from the material available or schedule a meeting with a Cimetrix representative.

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