Implementing Equipment Control Applications using CCF

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Our customers [were] demanding high-speed, dependable information from tool suppliers in order to improve yield, productivity and reliability. Axcelis and Cimetrix developed software for our Integra RS tool using CIMControlFramework to deliver optimum data collection, storage, management and analysis. Process and equipment engineers now have more information accessible to them for accurate monitoring and troubleshooting, saving them time and improving performance of the toolset.

Bill Bintz, Senior Vice President of Marketing, Axcelis Technologies, Inc.

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