EDA/Interface A Standards Presentation by Cimetrix

Industry experts developed the SEMI EDA (Equipment Data Acquisition) standards in order to facilitate data acquisition integration and improve data quality. Fabs will use EDA for APC data gathering and e-diagnostics while the existing SECS/GEM interface will remain intact for MES connectivity. Correct EDA implementations will have a significant impact on the equipment manufacturer's software architecture to enable full access to necessary data as requested by the International SEMATECH Manufacturing Initiative (ISMI).

• Key benefits of EDA
• Data & Reporting Features available through
  the SEMI EDA Standards
• Possible challenges implementing EDA