Cimetrix created factory connectivity products to help equipment manufacturers comply with SEMI equipment communication standards.
SECS/GEM was the beginning, enabling IC makers to communicate and control wafer fabrication equipment. The introduction of 300mm wafers, with the attending demand for solutions that enabled far greater automation, created a whole new set of challenges. The GEM 300 standards were developed by SEMI to solve these challenges.
Cimetrix supports this industry initiative by developing and marketing software, services, and support for SECS/GEM, GEM 300, EDA (Interface A), and PV2 (PVECI) standards. Cimetrix is an active SEMI member and we hold two co-chair positions in SEMI committees for continuous standards development and evolution, including the North American GEM 300 Task Force. We are also involved with the SEMI PV Group, and we participate in various International SEMATECH Manufacturing Initiative (ISMI) programs.
This web page provides an overview of the SEMI GEM 300 standard.
For more information, download the Cimetrix GEM 300 Introduction White Paper.
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SEMI GEM 300 Standards Overview
Prior to the development of 300mm wafers, IC manufacturers required equipment suppliers to support only the SECS-II/GEM SEMI standards - SECS-II messaging (E5), GEM (E30), and either the HSMS (E37) or RS-232 (E4) transport protocol standard - with basic features for controlling and monitoring the equipment. With the move to larger and heavier 300mm wafer sizes and plans to maximize production throughput through automation, semiconductor factories required automated material delivery to and from each unit of equipment, along with remote equipment configuration and control. In order to achieve this, additional communication standards were required to manage the material delivery, configure the equipment processing, and track the material.
Today, IC makers require production equipment to comply with the SEMI GEM 300 standards, including at least SEMI standards
- E30 - Generic Model for Communications and Control of Manufacturing Equipment (GEM)
- E39 - Object Services Standard: Concepts, Behavior, and Services
- E40 - Standard for Processing Management
- E87 - Specification for Carrier Management (CMS)
- E90 - Specification for Substrate Tracking
- E94 - Specification for Control Job Management
These standards allow the factory to control and monitor the equipment in a consistent way to implement automation.
Additional standards may also be required, such as:
- E116 - Specification for Equipment Performance Tracking (EPT)
- E148 - Specification for Time Synchronization and Definition of the TS-Clock Object
- E157 - Specification for Module Process Tracking (MPT)
In order to develop industry-wide standards all equipment suppliers and IC makers could agree to and use, the GEM 300 standards were developed by the Semiconductor Equipment and Materials International (SEMI) organization, the trade association serving the global semiconductor equipment, materials, and flat panel display industries. SEMI represents approximately 2,400 members. For more information on SEMI, please visit their web site, www.semi.org.