During 2009 and 2010, IC makers started requiring integrated EDA solutions from the equipment suppliers. Since then, the demand has continued to increase as IC makers roll out plans to improve yield and equipment utilization.
Because the EDA standards continue to evolve and change, ISMI and its member companies have initiated the concept of freeze versions. A freeze version allows equipment suppliers to develop new systems that can be installed into factories, and allows IC makers to develop new data-gathering client applications, while SEMI continues to develop the EDA standards. Each freeze identifies a specific version of the individual EDA standards (E120, E121, E125, E128, E132, E134, E138, and E147) that equipment suppliers and IC makers use as a unified set to implement the interface. The industry adopted the initial ISMI 1105 freeze version in 2006, and then, four years later, ISMI announced a new 0710 freeze version that includes many improvements and some new capabilities.
SEMI adopted the freeze version concept by creating two downloadable bundles of standard schema files: one for the 1105 freeze version and another for the 0710 freeze version. These are available on the SEMI website http://www.semi.org/
This page offers a brief overview of EDA/Interface A SEMI standards. For more information, download the Cimetrix Introduction to SEMI EDA Standards White Paper.
Interface A/EDA Terminology and Acronyms
Equipment suppliers need to ensure they implement the version of the standard that is implemented on the client side at the manufacturing site.