Specification for the Common Equipment Model (CEM)
The SEMI Interface A, also known as Equipment Data Acquisition (EDA), standards are a collection of SEMI standards to improve and facilitate communication between IC Maker’s data gathering software applications and the factory Equipment. SEMI E120 provides a general object model that represents an external view of Equipment. The model is composed of various classes organized in a logical hierarchy. A fully-implemented model summarizes all of the Equipment's major hardware and software components. SEMI standard E120.1 XML Schema for the Common Equipment Model (CEM) maps the E120 standard into a specific XML implementation.
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SEMI E120 Major Classes
|Models the equipment as a whole and contains MaterialLocations, Modules, Subsystems and IODevices.
|Models a major equipment subsystem that can process material like a process or inspection chamber. It may contain MaterialLocations, Modules, Subystems and IODevices.
|Models a major equipment subsystem that cannot process material like a load port or prealigner. It may contain MaterialLocations Subsystems, and IODevices.
|Models sensors, actuators or intelligent actuator or sensor devices.
|Models the ability of an equipment component to hold material, specifying the material type as Carrier, Substrate, or ProcessDurable.
E120 Concrete and Abstract Classes
|Describes the existence and version of software that is in use on the equipment and on equipment components. The software might be supplied by the equipment manufacturer or a third party. Attributes identify the supplier, version and a description.
|The basic information required for each hardware component, such as an AbstractModule, Subsystem or IODevice. Attributes identify the supplier, make, model, role, revision, and (if applicable) serial number.
|A subclass of EquipmentElement that models the parts of the equipment structure capable of processing material; namely Modules and Equipment. The attributes specify the process type as Measurement, Process, Storage or Transport and specifies the recipe type.
|The root of every class to provide unique identification and a description for each component.
|Provides the ability for other standards and specific implementations to extend the CEM.
- E125 Specification for Equipment Self Description (EqSD)
- E132 Specification for Equipment Client Authentication and Authorization
- E134 Specification for Data Collection Management
Download the complete Cimetrix white paper on the SEMI EDA Standards