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EDAConnect Software Library for Client-Side Equipment Data Acquisition (EDA)

The EDAConnect software product is a .NET assembly to enable applications to implement the client-side of the EDA SEMI standards (also known as Interface A), SEMI Standards E120, E121, E128, E125, E132, E134, E138 and E147. EDAConnect is appropriate for most EDA client applications include data collecting APC, SPC, FDC, R2R and/or database systems. EDAConnect can also be used to implement EDA Access Control List (ACL) administration; a requirement for all EDA implementations. Finally, EDAConnect can be use to implement standard or custom EDA compliance testing.

EDAConnect Architecture

Although the EDAConnect library is only available to run in the .NET environment on a Windows system, it is possible to integrate EDAConnect with other environments and even non-Windows systems by using bridge software and possibly setting up a front-end Windows computer for running EDAConnect and the bridge software. Because of EDAConnect's high performance, one Windows computer can be used as a bridge system to collect data from multiple equipment. Cimetrix Global Services and Data Management Solution Center can provide EDAConnect consultation and integration services.

Features & Benefits

Feature Benefit
Version-Independent Abstraction Layer Use the same application to communicate with equipment using different versions of the EDA standards. Upgrade an application to a new version of the EDA standards without changing the application.
Built-In Web Service Receive data and other equipment-initiated message notification using simple .NET delegates. It could not be easier.
Model Cache Minimize unnecessary communication with the equipment. View and analyze equipment models off-line.
Easy to Use Establish an EDA session and gather data with minimal knowledge of the EDA standards.
Optimized for Performance EDAConnect uses the CPU as efficiently as possible.
.NET Forms and Controls With minimal development effort, develop applications with graphical user interface features to browse the equipment model and setup data collection.
Sample Applications Use the sample application source code as a resource for application development.
Access to Version-Specific Driver Testing applications can verifiy specific details of the EDA web service operations.
Ability to have a Custom Version Applications can use the abstration layer with confidence even when an equipment might implement a non ISMI freeze version of the standards. This can also be used to communicate with equipment that have unusual interpretations of the EDA standard.
Data Annotation Data interpretation is simplified when the application does not have to maintain association between the data collection plan and the data collection reports.
Simple Logging Create SOAP message logs with minimal effort when tracking down defects.
Runtime Schema Validation Because applications at any time can enable or disable schema validation for all messages (incoming and outgoing, client-initiated and equipment-initiated), it is easy to diagnose violations of the standard schemas. At the same time, EDAConnect processes messages as best it can so that data collection can continue despite the violations.

Related SEMI Standards

E120/E125

SEMI E120 defines the Common Equipment Model, an abstract model for describing an equipment's physical structure. SEMI E125 is a specific implementation of E120 for equipment self-description that includes units, types, events, state models, equipment structure, and alarms/exceptions. CIMPortal requires a unique data model file for each tool that adheres to these standards. CIMPortal includes an XML schema to enforce the rules for the data model file.

E132

SEMI E132 defines client authentication and a flexible authorization scheme to control client access. A client cannot access any information through Interface A until authenticated by CIMPortal. Authenticated clients must obtain authority to access data within Interface A. This allows equipment suppliers and fabs to establish rules that restrict access to sensitive or proprietary information.

E134

SEMI E134 defines the format and usage of Data Collection Plans and Data Collection Reports for Interface A messaging. CIMPortal accepts standard Data Collection Plans from Interface A Clients and generates the appropriate standard Data Collection Reports using Web Services.

EDAConnect System Requirements

Cimetrix officially supports EDAConnect for use with the following Microsoft software development packages but other software development environments compatible with Microsoft Component Object Module (COM) can be used.:

Cimetrix supports EDAConnect for use with applications developed in the following Microsoft programming languages:

Additional Information

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