The SEMI Interface A, also known as Equipment Data Acquisition (EDA), standards are a collection of SEMI standards to improve and facilitate communication between IC Maker’s data gathering software applications and the factory Equipment.The E125 standard allows clients to request helpful descriptions about all information available for data gathering including the parameters (specific data, units, and types), events, exceptions, state machines, SEMI E39 data and physical configuration. All of the available information is mapped into the E120 Common Equipment Model object hierarchy. SEMI standard E125.1 Provisional Specification for SOAP Binding for Equipment Self Description (ESDS) maps the
E125 standard into a specific SOAP/XML implementation.
Download the complete Cimetrix White Paper on the SEMI EDA Standards.
SEMI E125 Standard Organization of Metadata
This standard allows the end-user to know information about what data can be monitored on the Equipment and the context (i.e. process chamber #1 or #2) without having to entirely rely on the Equipment's documentation. Interface A clients can implement plug-and-play methodology, automatically utilize new information immediately after an Equipment's interface is revised and implement graceful error recovery if data is unavailable unexpectedly.