CIMPortal ™ Software for Equipment Data Acquisition (EDA)
The CIMPortal software development kit provides a comprehensive
equipment data acquisition (EDA) solution for equipment
manufacturers as well as for
integrated device manufacturing (IDM)
retrofitting existing equipment. Once an equipment model is
created and the data collection is integrated into CIMPortal,
multiple modules can simultaneously access the equipment model
data at the same time. The CIMPortal Interface A module, CIMWeb,
is 100% compliant to the
SEMI Interface A standards. The CIMPortal
DB module, CIMStore, supports collecting data into a MySQL
database and even enables conformance to the JEITA TDI
specification. CIMPortal Bundle includes both CIMWeb and CIMStore
to simultaneously support Interface A and local database storage.
- CIMPortal Architecture
- CIMPortal Products
- Features & Benefits
- Advanced Process Control (APC) Data Gathering
- Tool Data Interface (TDI) Specification Compliance
- Data Collection Interface Modules (DCIM) Application
- Related SEMI Standards
- System Requirements
- Additional Information
Visit the CIMPortal Resources page for more information.
Photo copyright Sven Döring/AMD
CIMPortal Architecture
The CIMPortal software development kit includes tools for
designing, developing, testing/optimizing and deploying an
Interface A solution. Performance and flexibility have been
carefully considered to allow adherence to SEMATECH requirements
while considering the technical challenges when integrating
multiple distinct data sources. Use the Equipment Modeling GUI to
design and develop an E120
/E125 compliant XML Equipment Model that
describes the major equipment components in a hierarchal form and
lists all of the associated Parameters, Events, Exceptions, and
SEMIObjTypes available for data gathering. During development, use
the Equipment Modeling GUI to map the data available through
Cimetrix Data Collection Interface Modules (DCIM)
and custom DCIM with the XML Equipment Model. If
desired, add Access Control Lists to create protected data that
only authorized clients can access. CIMPortal includes a template
for creating custom DCIM and technical assistance for using each
of the packaged DCIM. Use the DCIM test application to unit test
DCIM development and configuration. During development, testing,
and optimization, use the open-source Interface A Clients to
validate the Interface A implementation. Once the Interface A
solution is completed, multiple Interface A Clients can
simultaneously establish sessions with the CIMPortal Engine,
define Data Collection Plans and receive
the generated Data Collection Reports. After deployment, the
E132 authentication,
message security and diagnostics features are configurable through
the CIMPortal Administrator without the need to restart. In
accordance with the
SEMI EDA standards, CIMPortal provides all of the
features necessary so that the IC Maker can extend the Equipment
Model with new components and metadata.
CIMPortal Products
The CIMPortal products provide software development tools that specifically target different EDA requirements. Versions of CIMPortal are available for both Equipment Suppliers and for IC Makers (Fabs). Cimetrix is an expert in Microsoft technology and solutions. Read more about Microsoft's support for the Interface A standards.
Cimetrix also offers the integration services to implement custom Interface A solutions.
Equipment Suppliers
Equipment Suppliers may choose from the following product software development kits.
- CIMPortal Bundle Software Development Kit (SDK)
Includes both CIMPortal Interface A SDK and CIMPortal DB SDK. - CIMPortal Interface A Software Development Kit (SDK)
Includes CIMWeb to implement the Interface A web server according to the SEMI specifications. - CIMPortal DB Software Development Kit (SDK)
Includes CIMStore to implement local data collection and store the data into a MySQL database.
Matching Runtime versions exist for each SDK. Each equipment (or tool) using CIMPortal requires a unique runtime license unless special arrangements are made with Cimetrix. Each license typically is stored in a unique file.
IC Makers
IC Makers own and purchase many equipment that do not provide Interface A support. Use CIMPortal to retrofit tools with Interface A solutions that include all GEM and 300mm information, add-on sensors, and other features. Start developing Interface A clients today and start using Interface A to increase yield and improve product quality.
- CIMPortal Interface A Starter Kit
Two copies of an equipment simulator that implement GEM 300 and use CIMPortal to implement EDA (Interface A) to learn the technology. Learn how to use the E120, E125, E132, and E134 standards in a real environment. - CIMPortal Interface A Pilot Kit
Includes multiple CIMPortal runtime licenses. Requires purchase of the CIMPortal Interface A Starter Kit. - CIMPortal Site License
Unlimited use of CIMPortal across one site.
Product packaging for equipment based Interface A development requires a Software Development Kit installation and license. Deployed systems require a CIMPortal runtime installation and license.
Features & Benefits
| Feature | Benefit |
|---|---|
| Full compliance with all SEMI Interface A standards (E120, E125, E132, E134, E138) | Implement a robust Interface A solution to fulfill worldwide IC Maker requirements |
| High Speed Output Interface | Once the data collection is integrated into CIMPortal's Dedicated High Speed Data Server, then the data is available to multiple modules simultaneously including CIMPortal Interface A, CIMPortal DB (MySQL database) and other data collection applications. |
| High performance CIMPortal Engine and Data Collection Interface Modules. | It is possible to not only meet but exceed SEMATECH's EDA performance expectations. |
| High degree of flexibility and configurability of the tool model, data collection, performance optimization, runtime installations, and diagnostics output | There are several methods for creating and managing the E120/E125 equipment models and synchronizing this with the equipment development processes. Facilitates unique deployments to conform to specific fab requirements and protect proprietary data |
| Advanced Message Security for unique fab requirements | Provides safe, secure messaging with authorized Interface A Clients-beyond the scope of the E132 Equipment Client Authentication / Authorization (ECA) standard. This includes the support of HTTPS certificate encryption and many other security features. |
| Leverages CIMConnect's architecture for increased performance | Equipment suppliers that use CIMConnect benefit from its multiple-host feature. The fab MES connects directly to one port while CIMPortal is connected to another high speed non-SECS port. |
| Flexible DCIM architecture with data integrity enforcement | Enables easy data collection from different sources while maintaining the value, timing, synchronization and context of the data. Allows migration strategy for implementing the SEMI EDA standards. |
| Complete set of EDA tools for design, deployment, testing, configuration management and maintenance | Allows fast time to market, and flexible robust deployments by aligning tools with proper development processes |
Advanced Process Control (APC) Data Gathering
Industry experts declared that Advanced Process Control (APC) is a key to decreasing operational costs, increasing informational flow rates, and enabling technological advances. APC disciplines such as Run-to-Run Control (R2R or RtR), Statistical Process Control (SPC), and Fault Detection and Classification (FDC) all require a robust equipment data acquisition framework. Traditional solutions have been implemented using the SEMI SECS/GEM standards or other proprietary solutions. Industry experts developed the Interface A standards to establish that robust framework for the future in order to facilitate data acquisition integration and improve data quality. The resulting EDA (Interface A) SEMI standards; E120, E121, E125, E128, E132, E134, E138 and E147. Most were approved in October, 2004 and others were approved more recently. Fabs will use Interface A for APC data gathering and e-diagnostics while the existing SECS/GEM interface will remain intact for MES connectivity. Correct Interface A implementations will have a significant impact on the equipment manufacturer's software architecture to enable full access to necessary data as requested by the International SEMATECH Manufacturing Initiative (ISMI). CIMPortal provides complete Interface A functionality, accommodates different software and hardware architectures, and establishes a fundamentally correct framework that complies with ISMI guidelines. Integrate CIMPortal directly within the equipment supplier's tool controller as an embedded solution, or install CIMPortal on a stand-alone Windows PC.
Tool Data Interface (TDI) Specification Compliance
In order to satisfy many semiconductor manufacturer specifications, many equipment suppliers must implement and comply with both Interface A and implement local data storage such as outlined in the JEITA Tool Data Interface (TDI) functional specification. TDI is a developing specification that provides guidelines and requirements for equipment suppliers to store and manage a local database with historical equipment data; unlike Interface A which focuses on providing live data. The historical data is primarily for the local EEQA and EEQM software to use for product quality enhancement, yet the historical data will also become available directly to the IC Makers through Interface B1 -- typically ODBC. CIMPortal's architecture provides an excellent foundation to support both Interface A and TDI at the same time. All of the data available through CIMPortal's High Speed Output Interface is available to Interface A clients and for storage in the TDI database.
Data Collection Interface Modules (DCIMs) Application
CIMPortal can gather data directly from multiple sources, unify the data within a single Equipment Model, and deliver the unified data seamlessly into a single Interface A implementation and other modules. CIMPortal uses Data Collection Interface Modules (DCIMs) to gather data and receive events, exceptions, and traces from different sources throughout the tool. As an example, one equipment might be configured with four DCIMs at the same time to query and receive Interface A information directly from a SECS/GEM interface, sensors, a SQL Server database, and the equipment's tool control application. All of the different data sources are integrated into one E125 compliant Equipment Model. A DCIM can even transfer data into the EDA implementation from another computer-including non-Windows platforms. Furthermore, DCIMs can be added and/or configured after deployment to accommodate add-on sensors or another fab-specific customization. The SECS/GEM DCIM interface can generate Interface A data from the SECS/GEM interface while implementing a pass-through SECS/GEM interface to maintain unaffected fab Manufacturing Execution System (MES) connectivity. Alternatively, the SECS/GEM DCIM can use a second GEM port if the equipment has one. CIMPortal includes a growing set of packaged DCIM available to all customers. Customers can also develop custom DCIM to access proprietary data sources.
Related SEMI Standards
- SECS/GEM SEMI Standards: Reference to an equipment interface that complies with SEMI standards, E5 (SECS-II), E30 (GEM), and E37 (HSMS) to provide basic fab MES connectivity. CIMPortal can utilize the features in these standards as one source to generate Interface A Data Collection Reports. These standards also provide the foundation for other connectivity standards such as E39, E40, E87, E90, E94, and E116.
- E120 Specification for the Common Equipment Model (CEM) and E125 Specification for Equipment Self Description (EqSD): SEMI E120 defines the Common Equipment Model, an abstract model for describing an equipment's physical structure. SEMI E125 is a specific implementation of E120 for equipment self-description that includes units, types, events, state models, equipment structure, and alarms/exceptions. CIMPortal requires a unique data model file for each tool that adheres to these standards. CIMPortal includes an XML schema to enforce the rules for the data model file.
- E132 Specification for Equipment Client Authentication and Authorization: SEMI E132 defines client authentication and a flexible authorization scheme to control client access. A client cannot access any information through Interface A until authenticated by CIMPortal. Authenticated clients must obtain authority to access data within Interface A. This allows equipment suppliers and fabs to establish rules that restrict access to sensitive or proprietary information.
- E134 Specification for Data Collection Management: SEMI E134 defines the format and usage of Data Collection Plans and Data Collection Reports for Interface A messaging. CIMPortal accepts standard Data Collection Plans from Interface A Clients and generates the appropriate standard Data Collection Reports using Web Services.
JEITA TDI Specification
Here is a list of websites and acronyms related to the TDI specification.
- SELETE (Semiconductor Leading Edge Technologies)
- JEITA (Japan Electronics and Information Technology Association)
- EES Data collection Capability Requirement Document, Mar 30, 2003
- TDI(Tool Data Interface), Oct 15, 2003
- EEQA (Equipment Enhanced Quality Assurance), June 9, 2005
- EEQM (Equipment Engineering Quality Management)
One document about fault detection in Japanese only - DEE (Detailed Equipment Event Data)
- Interface B1
Interface from a local historical database to fab software - Interface B2
Interface from the local EES to fab software
CIMPortal System Requirements
- Microsoft Windows XP Professional with IIS 5.1
- Microsoft Windows Server 2003 with IIS 6.0
- Microsoft Internet Informational Services (IIS)
- Microsoft ASP.NET 2.0 (or the Microsoft .NET Framework 2.0)
- Ethernet Card
- 200 MB Hard Drive Space
- 1 GB RAM
Cimetrix officially supports CIMPortal for use with the following Microsoft software development packages but other software development environments compatible with Microsoft Component Object Module (COM) can be used.:
- Microsoft Visual Studio 6.0
- Microsoft Visual Studio .NET 2003
- Microsoft Visual Studio .NET 2005
Cimetrix supports CIMPortal for use with applications developed in the following Microsoft programming languages:
- Microsoft Visual Basic
- C++
- C#
In addition, software applications running on non-Windows operating systems like Unix can provide data directly into CIMPortal using the TCP/IP DCIM or TCP/IP App DCIM using a TCP/IP port. While CIMPortal must run on a Windows computer, it is common to use CIMPortal with equipment that have non-Windows computers. Equipment suppliers that use PLCs, Unix or QNX based control systems add a Windows PC to run CIMPortal to handle the factory communications. Software architects frequently design internal equipment networks with software applications to communicate between systems.
Additional Information
Some of this information may require Acrobat Reader available for free from Adobe.
- Download the CIMPortal Datasheet
- Request the CIMPortal Technical Overview
- Visit the CIMPortal Resources page for more information on the product
- Download the complete white paper on the SEMI EDA Standards
- View a Presentation on SEMI EDA Standards Features & Benefits
- Read about Microsoft's support for the Interface A standards
- View the complete list of Cimetrix's Interface A software products & tools
Schedule an architecture discussion to discuss your individual project requirements.
